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  • 2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference
  • (Optica Publishing Group, 2017),
  • paper CE_11_2

Fabrication of free-standing glass beams as optical waveguides

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Abstract

Femtosecond laser machining combined with chemical etching offers an efficient and accurate way for producing complex three-dimensional structures out of fused silica. The versatility of the femtosecond laser machining together with the properties of fused silica makes it an ideal tool for integrating of micromechanical [1], microfluidic [2] and optical [3] devices, using the same fabrication method.

© 2017 IEEE

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