Abstract

Integrated optical waveguides based on stoichiometric silicon nitride (Si₃N₄) grown with low pressure chemical vapor deposition (LPCVD) are of high importance for applications, e.g., in microwave photonics [1] and quantum optics [2] due to their record-low loss and broad spectral transparency range. The material’s third-order nonlinearity and wide transparency have enabled efficient nonlinear conversion, specifically, supercontinuum generation with record-wide bandwidth [3,4] and are promising for all-optical switching [5].

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