Abstract

Laser materials processing has already been established for many years in industrial application, especially in the applications of welding, cutting, or drilling. During the recent years many other applications like additive manufacturing, structuring or short pulse processing for the micro and nano scale have come into play. All these laser processes have in common that they need high precision handling systems and properly set processing parameters. In case of small deviations from the set parameters, which may have many different reasons, the processing result might be faulty or at least out of the expected boundaries. Therefore it has since been an issue to control the process by online monitoring the laser, handling system and especially the process itself.

© 2015 IEEE