Amongst the available lithography techniques, soft UV-nanoimprint lithography (UV-NIL) offers the lowest patterning cost per wafer and provides additional design freedom for fabricating DFB and DBR laser diodes [1]. We have earlier demonstrated cost-effective UV-NIL-based fabrication of 1.55 µm DFBs with laterally-coupled ridge-waveguide (LC-RWG) surface gratings having a side-mode-suppression-ratio (SMSR) as high as 60 dB [2]. Here we report on the DBR-RWG grating design, the fabrication process, and the output characteristics of tapered DBR lasers made using UV-NIL. To our knowledge this is the first demonstration of DBR lasers fabricated using soft-UV-NIL on wafer-scale. The fabricated DBR lasers exhibited a CW output power as high as 400 mW in single-mode operation at room temperature. Even at maximum output power the SMSR was at least ~45 dB, proving the excellent behavior of the surface gratings.

© 2015 IEEE

PDF Article
More Like This
Soft UV-Nanoimprint lithography for the Fabrication of Frequency Selective Components

J. Viheriälä, J. Tommila, A. Laakso, S. Ranta, I. Vartiainen, H. Tuovinen, J. Telkkälä, T. Vallius, T. Niemi, M. Dumitrescu, and M. Pessa
CE7_4 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2009

High-Power 1550 nm Tapered DBR Laser Diodes for LIDAR Applications

Antti T. Aho, Jukka Viheriälä, Jaakko Mäkelä, Heikki Virtanen, Sanna Ranta, Mihail Dumitrescu, and Mircea Guina
CB_7_4 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2017

Distributed Feedback Laser Diodes Emitting at 894 nm Suitable for Atomic Clock Applications Fabricated Using Nanoimprint Lithography

Jarkko Telkkälä, Jukka Viheriälä, Antti Laakso, Kari Leinonen, Jari Lyytikäinen, Jukka Karinen, Mihail Dumitrescu, and Markus Pessa
JTuD102 Conference on Lasers and Electro-Optics (CLEO) 2010


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription