Tunable vertical-cavity surface-emitting lasers (VCSELs) are highly desirable in long reach reconfigurable wavelength division multiplexed passive optical network (WDM-PON) systems. As a colorless source, the widely tunable VCSEL can be utilized in applications including sparing, hot backup and fixed wavelength laser replacement for inventory reduction. A record continuous tuning of 102 nm has already been demonstrated for previous generation micro-electro-mechanical system (MEMS) VCSELs [1]. A small-signal modulation (S21) bandwidth of 7.8 GHz with a high-contrast grating (HCG) VCSEL is reported only for 1550 nm [2]. In this work, a MEMS distributed Bragg reflector (DBR) is integrated to a 1550 nm Benzocyclobutene (BCB) encapsulated active VCSEL structure by means of surface micromachining. The InP-based half-VCSELs are specially designed for high speed application by lowering the RC-parasitics. For an essential reduction of capacitance-parasitic, the semiconductor is sidewise replaced by low-k material BCB. Wide tunability is realized by electro-thermal actuation of the MEMS DBR using an external heating current. The DBR consists of 11.5 layer-pairs of dielectric materials SiNx/SiOy deposited in a low-temperature plasma enhanced chemical vapor deposition (PECVD) chamber.

© 2015 IEEE

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription