Abstract

Femtosecond laser micro and nano-processing is a versatile material processing tool which has opened up a broad range of technologies and applications. However, in the particular context of the fabrication of deep trenches and channels, precise control of profile of the ablated structure is extremely challenging. We have recently developed a novel approach to fabricate controlled high aspect structures using novel Bessel and Airy beams, and this contribution will review our recent work in this field.

© 2013 IEEE