In recent years highly efficient waveguide lasers based on femtosecond-laser (fs-laser) written waveguides in crystalline materials could be realized. One approach for the fabrication of waveguiding structures is the inscription of two parallel tracks of modified material with distances in the order of 20 µm and the waveguiding region in between [1, 2, 3]. During the fabrication process the sample is moved perpendicular to the incident beam of the fs-laser.

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