Abstract

Micromechanical resonators are widely used as inertial balances to detect small quantities of adsorbed mass through shifts in oscillation frequency [1]. In such applications, an interferometer is considered as a promising instrument for detecting the oscillations which could have ultra-small amplitude. However, due to its high sensitivity, an interferometer is open to an influence of external impacts such temperature drift, industrial noise, etc. Moreover classical homodyne interferometer is very sensitive to a quality of probe beam. Alternatively the interferometer can be implemented with use of dynamic holograms recorded in a photorefractive crystal [2]. Due to adaptive properties of dynamic holograms, such an interferometer can stably operate in industrial environment with light waves having complex wave fronts.

© 2013 IEEE