Abstract

Extrinsic Fabry-Perot interferometric (EFPI) pressure sensors are a key asset in a number of applications, including medical devices, life science, oil&gas, and energy plants [1]. EFPI probes, as in Fig. 1A, are based on creating an air-gap cavity L within an optical fiber structure, acting as a Fabry-Perot resonator; the fiber tip d acts as a diaphragm, compressing the air gap as a function of the pressure applied on the fiber surface. The sensitivity of EFPI probes is strongly dependent upon diaphragm thickness, which is approximately proportional to d−3, and ranges from 0.01 nm/kPa to 10 nm/kPa. An accurate optimization of the diaphragm length is required to match target performances, in terms of sensitivity, pressure accuracy, and working range [2]. Hydrofluoric acid (HF) is employed for diaphragm shrinking, as it allows controlled glass fiber etching while maintaining polishing quality; however, HF etching rate is poorly repeatable, leading to a poorly predictable diaphragm length. Industrially, this problem has highly affected probes performance repeatability.

© 2013 IEEE

PDF Article
More Like This
Low-cost miniature fiber-optic extrinsic Fabry-Perot interferometric pressure sensor for biomedical applications

Sven Poeggel, Daniele Tosi, Gabriel Leen, and Elfed Lewis
87970B European Conference on Biomedical Optics (ECBO) 2013

Low-Cost Miniature Fiber Optic Extrinsic Fabry-Perot Interferometric Sensor for Cardiovascular Pressure Measurement

S. Poeggel, D. Tosi, G. Leen, and E. Lewis
CH_6_4 The European Conference on Lasers and Electro-Optics (CLEO_Europe) 2013

Cost-effective in-line optical fiber Fabry-Perot interferometric pressure sensor

M. Fátima Domingues, Camilo A. Rodriguez, Joana Martins, Nélia Alberto, Carlos Marques, Mário Ferreira, Paulo André, and Paulo Antunes
JTu4A.15 Integrated Photonics Research, Silicon and Nanophotonics (IPRSN) 2017

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription