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Optical microscopy has been a driving motor in science for several centuries. One main principle in microscopy is that the smallest resolvable detail in a microscopic image is limited to half the wavelength of the light illuminating the object. To overcome this limitation, the object should be illuminated with shorter wavelengths in the extreme ultra violet (XUV). The main problem in the XUV is the lack of efficient imaging optics and high absorption of solid matter. A possible solution for this is lenseless imaging [1].
© 2013 IEEE
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