Abstract
We use laser light interaction with small spherical microparticles to deliver highly-localized light energy (also called photonic nanojets) inside thin-film materials. Taking benefit of the self-assembly properties of microspheres, we use the approach to obtain parallel and ordered laser machining of thin-films with sub-wavelength resolution. Since femtosecond laser light is used, the proposed methodology can be applied to any materials (metals, semiconductors and dielectrics). We demonstrate the fabrication of 2D-photonic crystals and/or plasmonic arrays.
© 2011 Optical Society of America
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