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The pulsed laser deposition technique (PLD) allows for manufacturing thin layers from a wide range of materials [1]. In our experiment we deposit Nd:YAG layers on a fused silica substrate by pulsed laser ablation from a rod target using a Q-switched laser system (Nd:YVO4) emitting 12 ns pulses at 1064 nm with a repetition rate of 20 kHz. We produced the layers in a vacuum chamber in a typical setup with the laser tilted 45° with respect to the surface normal. The ablation fluence on the target was around 4 J/cm2.
© 2011 Optical Society of America
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