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Optica Publishing Group
  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CM4_4

Surface percolation and growth (SPAG), an innovative approach to far field optical nano-lithography

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Abstract

A nanolithography scheme is presented by which the structure size can be controlled in the tens of nanometer range by means of the initiation of the polymerization mediated by a very inefficient energy transfer from a fluorescent dye molecule after single photon absorption. The mechanism relies in the following distinctive steps: 1- Mixture of the dye molecules and polymer in adequate proportions. 2- Deposition of the mixture on a transparent substrate. 3- Adsorption of a fraction of the dye molecules on the substrate material. 4- Illumination of the mixture with a focused beam through the substrate at the absorption band of the dye. 5- Initiation of the polymerization by due to a very low quantum yield energy transfer from the dye to the polymer. 6- Percolation of the structure growing at the substrate surface. 7- Deposition of fresh dye molecules from the bulk onto the growing surface. 8- Photoinitiation of the fresh molecules as the structures grows.

© 2009 IEEE

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