Abstract
MEMS-based variable optical attenuators (VOAs) using a shutter, a mirror, or a grating have been proposed in the field of optical telecommunication [1]. The MEMS-based VOAs used in optical telecommunication, however, are not suitable for optical instruments, in which a light beam is not always single mode (i.e. is low spatially coherent ) and optical power to be regulated can substantially vary (> 40 dB).
© 2009 IEEE
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