Abstract

Given intensity formation is often required in many laser applications, for instance, laser processing, laser lithography. Beam shaping can be performed by use of soft diaphragms, spatial-frequency filtration, conical mirrors. A specified laser intensity distribution can generally be formed with either extracavity or intracavity methods. In this paper we consider both methods. We use 40 mm in diameter, 18-electrode bimorph flexible mirror extracavity and intracavity. With the help of just one flexible controlled mirror one can form the number of given laser output distributions.

© 2007 IEEE