Abstract

As the need for precision machining has grown, especially, to enable advances in smaller, faster, lower power consumption micro-electronics products, so have the capabilities in industrial lasers capable of high precision machining. One of the most important application decisions is related to the choice of ns regime or ps regime lasers. The appeal for higher precision, lower HAZ (heat affected zone) as well as layer selectivity offers new capability. We will cover key aspects of ns vs. ps choice and examples of good fit for each in key micro-electronics applications.

© 2010 Optical Society of America

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