Wavelength-dependent modification of silicon by femtosecond pulses

Roland A. Richter; Vladimir Kalashnikov; Irina T. Sorokina

doi:10.1364/CLEO_AT.2021.JTh3A.73

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper JTh3A.73
•https://doi.org/10.1364/CLEO_AT.2021.JTh3A.73

Wavelength-dependent modification of silicon by femtosecond pulses

Roland A. Richter, Vladimir Kalashnikov, and Irina T. Sorokina

CLEO: Applications and Technology 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Joint Poster Session III (JTh3A)

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R. A. Richter, V. Kalashnikov, and I. T. Sorokina, "Wavelength-dependent modification of silicon by femtosecond pulses," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper JTh3A.73.

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Abstract

Numerical analysis of non-paraxial sub-µJ ultra-short pulse propagation at 1550–2350 nm up to NA=0.25 shows that longer wavelengths are advantageous to avoid surface damage for low-depth bulk silicon modifications

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