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MEMS FTIR Parallel Spectrometer for Non-Invasive Skin Biochemistry Analysis

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Abstract

MEMS FTIR parallel-core spectrometer is presented for biochemistry analysis. The fabricated chip comprising 2 interferometers shows an SNR of about 1000:1 on the human skin using diffuse reflectance interface and a single photodetector.

© 2021 The Author(s)

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