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Conferences > CLEO_AT > 2019 > ATu4I > ATu4I.2

Femtosecond Laser decapsulation of micro-electronics Including parameter study and redeposition control

Nicholas May and Sina Shahbazmohamadi

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Abstract

A recipe was constructed resulting in full laser decapsulation of a packaged microelectronic device. A parametric study on a sub-130 fs laser scanning system considering redeposition control was carried out and quantified with light-confocal microscopy.

© 2019 The Author(s)

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