Abstract

Rib and buried channel waveguides (BCWs) made of unannealed PECVD SiO2 were studied after exposure to high humidity. Low stressed rib waveguides had lower optical throughput change, while high index difference BCWs were practically unaffected.

© 2017 Optical Society of America

PDF Article
More Like This
Silicate Spin-on-Glass as an Overcoat Layer for SiO2 Ridge Waveguides

Matthew A. Stott, Thomas A. Wall, Damla Ozcelik, Joshua W. Parks, Gopikrishnan G. Meena, Erik Hamilton, Roger Chu, Holger Schmidt, and Aaron R. Hawkins
JTh2A.29 CLEO: Applications and Technology (CLEO_AT) 2015

Low propagation loss binary ZrO2-SiO2 optical waveguides

Yingfeng Li, Shaojun Wang, Liying Liu, and Lei Xu
C476 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2011

Large Mode-Field-Diameter Surface Optical Coupler Based on SiO2-Capsuled Vertically Curved Si Waveguide

Y. Atsumi, T. Yoshida, E. Omoda, and Y. Sakakibara
Th2A.8 Optical Fiber Communication Conference (OFC) 2017

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Supplementary Material (1)

» Media 1: PDF (1281 KB)