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Conferences > CLEO_AT > 2017 > ATh3C > ATh3C.6

Extreme ultraviolet laser ablation mass spectrometry for sensitive materials studies and nanoscale chemical imaging

Ilya Kuznetsov, Tyler Green, Andrew M. Duffin, Tomas Burian, Libor Juha, Weilun Chao, Jorge J. Rocca, and Carmen S. Menoni

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Abstract

We demonstrate molecular composition imaging of inorganic samples by extreme ultraviolet laser ablation mass spectrometry. Composition changes across a sharp boundary are identified with a spatial resolution of 30 nm. The method has applications in studies of surface and interface chemistry, diffusion and contamination at nanoscale dimensions.

© 2017 Optical Society of America

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