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Investigation of Semi-Polar GaN Grown on (0001) C-plane Nano-Sized Patterned-Sapphire Substrates

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Abstract

This paper reported the growth of semi-polar GaN epi-layers on (0001) c-plane nano-sized patterned-sapphire substrates (c-NPSSs). In addition, the impact of c-NPSSs on the quality of semi-polar film had also been studied.

© 2016 Optical Society of America

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