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Conferences > CLEO_AT > 2014 > ATu2L > ATu2L.2

Opaque film metrology using PULSE Technology

Manjusha Mehendale

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Abstract

PULSE Technology™ involves generation and detection of acoustic waves in opaque layers using ultrafast laser pulses. Its application in advanced semiconductor and packaging industry for single and multi-layer thin film metrology is presented.

© 2014 Optical Society of America

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