Simple autofocusing method by image processing for two-photon lithography

Taichi Furukawa; Yoko Fujishiro; Shoji Maruo

doi:10.1364/CLEOPR.2020.PDP_4

14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020)
OSA Technical Digest (Optica Publishing Group, 2020),
paper PDP_4
•https://doi.org/10.1364/CLEOPR.2020.PDP_4

Simple autofocusing method by image processing for two-photon lithography

Taichi Furukawa, Yoko Fujishiro, and Shoji Maruo

Conference on Lasers and Electro-Optics/Pacific Rim 2020

Sydney Australia
3–5 August 2020
ISBN: 978-0-646-82504-5

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T. Furukawa, Y. Fujishiro, and S. Maruo, "Simple autofocusing method by image processing for two-photon lithography," in 14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020), OSA Technical Digest (Optica Publishing Group, 2020), paper PDP_4.

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Abstract

We propose a simple autofocusing method for two-photon lithography with an accuracy of sub-micron scale. We achieved the autofocusing by image processing using transmission images of photopolymerized voxels and demonstrated mass-fabrication of spiral square structures.

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