Photonic crystal cavities on silicon-on-insulator wafers with quality factors at 70,000 level were demonstrated using a Bosch etch process, with near-vertical sidewalls.

© 2020 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription