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Conferences > CLEOPR > 2018 > W4D > W4D.5

High Quality Factor Deuterated Silicon Nitride (SiN:D) Microring Resonators

Zeru Wu, Zengkai Shao, Zihan Xu, Yanfeng Zhang, Lin Liu, Chunchuan Yang, Yujie Chen, and Siyuan Yu

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Abstract

We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2 × 106 at 1547.6 nm, and >0.8 × 106 throughout 1500 – 1600 nm.

© 2018 The Author(s)

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