Real-time spectroscopic ellipsometer using a depolarizer

Jin Sub Kim; Dae Hee Kim; Ki-Nam Joo

doi:10.1364/CLEOPR.2018.W3A.139

CLEO Pacific Rim Conference 2018
OSA Technical Digest (Optica Publishing Group, 2018),
paper W3A.139
•https://doi.org/10.1364/CLEOPR.2018.W3A.139

Real-time spectroscopic ellipsometer using a depolarizer

Jin Sub Kim, Dae Hee Kim, and Ki-Nam Joo

Conference on Lasers and Electro-Optics/Pacific Rim 2018

Hong Kong China
29 July–3 August 2018
ISBN: 978-1-943580-45-3

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J. S. Kim, D. H. Kim, and K. Joo, "Real-time spectroscopic ellipsometer using a depolarizer," in CLEO Pacific Rim Conference 2018, OSA Technical Digest (Optica Publishing Group, 2018), paper W3A.139.

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Abstract

In this investigation, spectroscopic ellipsometry using a LCP (Liquid crystal polymer) type of depolarizer, named as spatially phase-retarded spectroscopic ellipsometry (SPARSE), is proposed to significantly raise the measurement speed compared to the typical spectroscopic ellipsometry.

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