Dual low coherence scanning interferometer for rapidly measuring large step height and thickness

Jun Woo Jeon; Hyo Mi Park; Ki-Nam Joo

doi:10.1364/CLEOPR.2018.W3A.135

CLEO Pacific Rim Conference 2018
OSA Technical Digest (Optica Publishing Group, 2018),
paper W3A.135
•https://doi.org/10.1364/CLEOPR.2018.W3A.135

Dual low coherence scanning interferometer for rapidly measuring large step height and thickness

Jun Woo Jeon, Hyo Mi Park, and Ki-Nam Joo

Conference on Lasers and Electro-Optics/Pacific Rim 2018

Hong Kong China
29 July–3 August 2018
ISBN: 978-1-943580-45-3

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J. W. Jeon, H. M. Park, and K. Joo, "Dual low coherence scanning interferometer for rapidly measuring large step height and thickness," in CLEO Pacific Rim Conference 2018, OSA Technical Digest (Optica Publishing Group, 2018), paper W3A.135.

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Abstract

In this investigation, we propose a novel concept to measure large height steps on the topographic surface of a specimen and the thickness profile of a transparent optical plate using a low coherence scanning interferometry.

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