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Conferences > CLEOPR > 2017 > FLPI > s2049
  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s2049

Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams

Xiao-long Liu, Weibo Cheng, and Pavel Polynkin

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Abstract

Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.

© 2017 Optical Society of America

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