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  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s1350

Mid-IR waveguides in SOI platform

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Abstract

We present mid-IR waveguides developed in Ge-on-SOI and SOI. The minimum loss achieved for Ge-on-SOI strip waveguides is 8 dB/cm and for SOI waveguides is 1.4 dB/cm for TE polarized light at 3.7 µm. These waveguides demonstrate the feasibility of employing Ge-on-SOI for high power integrated sensing and SOI to achieve low-loss interconnects.

© 2017 Optical Society of America

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