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Conferences > CLEOPR > 2015 > 27F2 > 27F2_6
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 27F2_6

Development of Ultrasound Sensor Using an SU-8 Polymer Based Fabry-Perot Interferometer

Hyunmin Yoon, Jeongmin Heo, Hyoung Won Baac, and Junseok Heo

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Abstract

Ultrasound sensing was investigated with SU-8 polymer based Fabry-Perot interferometers consisting of TiO2/SiO2 distributed Bragg mirrors (DBRs). The DBRs are properly modified to transmit an excitation pulse laser (532 nm) generating ultrasound in all-optical transducers.

© 2015 IEEE

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