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Conferences > CLEOPR > 2015 > 26P > 26P_81
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 26P_81

Analysis of laser induced oxidation processes with different laser powers

Feng Xia, Xinzheng Zhang, Meng Wang, Sanming Yi, Qian Liu, and Jingjun Xu

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Abstract

Metal-transparent-metallic-oxide (MTMO) grayscale photomasks fabricated by laser-induced oxidization are studied based on three stages oxidation theories and absorbed laser power density distribution. The calculated fabrication diameter is consistent with the experimental fabrication size.

© 2015 IEEE

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