Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 26H1_4

Direct Growth of Thick AlN Template on Micro-circle Patterned-Si Substrate

Not Accessible

Your library or personal account may give you access

Abstract

A 8-μm-thick AlN template has been successfully directly grown on micro-circle patterned-Si substrate. Low surface roughness of 3.5 nm and both screw and edge dislocation densities are in the order of 108/cm2 have been obtained.

© 2015 IEEE

PDF Article
More Like This
Growth and properties of ZnO film grown on AlN buffer layer by PLD

H. Xiong, J. N. Dai, Hui. Xiong, Y. Y. Fang, W. Tian, D. X. Fu, and C. Q. Chen
ITh4A.10 Information Optoelectronics, Nanofabrication and Testing (IONT) 2012

Fully Epitaxial AlN on Si using Molecular Beam Epitaxy Grown Nanowires for Ultraviolet Photonics

Songrui Zhao
STh3H.1 CLEO: Science and Innovations (CLEO:S&I) 2023

The Influence of V/III and Nucleation Layer on AlN films grown by MOCVD

Y.Y. Ding, H. Wang, W.Y. Yan, W. Tian, Y. Li, Y. Tian, J.N. Dai, Z.H. Wu, Y.Y. Fang, and C.Q. Chen
IF4A.09 Information Optoelectronics, Nanofabrication and Testing (IONT) 2012

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved