High-precision 3-D Surface Measurement of Step-structures Using Femtosecond Lasers

Young-Jin Kim; Young-Jin Kim; Minah Choi; Jiyong Park; Sangwon Hyun; Woodeok Joo; Seung-Woo Kim

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 26F3_2

High-precision 3-D Surface Measurement of Step-structures Using Femtosecond Lasers

Young-Jin Kim, Minah Choi, Jiyong Park, Sangwon Hyun, Woodeok Joo, and Seung-Woo Kim

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

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Optical Metrology and Sensing VI (26F3)

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Y. Kim, M. Choi, J. Park, S. Hyun, W. Joo, and S. Kim, "High-precision 3-D Surface Measurement of Step-structures Using Femtosecond Lasers," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 26F3_2.

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Abstract

Femtosecond pulse lasers provide novel possibilities to high-precision optical profilometry for quality assurance of step-structures on 3D microelectronic products based on its time and frequency domain characteristics.

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