Abstract

The efficiency is one of the most important parameter of single photon detector (SPD). The ideal SPD is expected to have 100% efficiency without false counts (always called dark counts). Improving the efficiency and reducing dark counts are interesting work for both scientific research and practical applications. Superconducting nanowire single photon detector (SNSPD) was intensively developed for its merit of low dark count, less than 1 count per second. However, its efficiency was limited by the optical absorption of superconductor nanowire. In this work, we analyzed the optical absorption of superconductor nanowire of SNSPD in theory. Then, we designed a SNSPD considering film growth and microfabrication process by optimizing the device structure, including the filling factor, films thickness, substrate index and cavity. With the SNSPD, a high absorption of 97% was calculated by FDTD method and a detector efficiency of 90% was achieved in experiments assisted by beam compressing settings.

© 2015 IEEE