High Performance Materials Processing Using Tailored Femtosecond Laser Pulses

Koji Sugioka; Katsumi Midorikawa; Fei He; Ya Cheng

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 26D3_1

High Performance Materials Processing Using Tailored Femtosecond Laser Pulses

Koji Sugioka, Katsumi Midorikawa, Fei He, and Ya Cheng

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

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Novel Laser and Optical Technologies in Manufacturing I (26D3)

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K. Sugioka, K. Midorikawa, F. He, and Y. Cheng, "High Performance Materials Processing Using Tailored Femtosecond Laser Pulses," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 26D3_1.

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Abstract

Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

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