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Conferences > CLEOPR > 2015 > 25J3 > 25J3_6
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 25J3_6

Controlling optical properties of Ge-on-Si by thermal annealing and etching process

Chulwon Lee, Bugeun Ki, Yang-Seok Yoo, Min-Ho Jang, Jungwoo Oh, and Yong-Hoon Cho

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Abstract

We studied optical properties of thermally annealed Ge-on-Si. From Raman experiments, tensile strain as well as Si-Ge intermixing were investigated. Significant Γ-band transition peak-shift was confirmed by photoluminescence depending on the thermal annealing conditions.

© 2015 IEEE

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