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Conferences > CLEOPR > 2013 > WM2 > WM2_3
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WM2_3

Ultraviolet-induced Wavelength Trimming of BCB-buried Athermal Si Slot Wavelength Filters

Yuki Atsumi, Takeshi Sifer, JoonHyun Kang, Yusuke Hayashi, Nobuhiko Nishiyama, and Shigehisa Arai

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Abstract

Wavelength trimming for athermal Si slot wavelength filter embedded with BCB using DUV exposure was demonstrated. The total shift of 1.21 nm was obtained after exposing 14 J/cm2 of DUV light without any degradation in athermal and propagation characteristics.

© 2013 IEICE

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