Low Temperature Hot-Wire Polysilicon Waveguides

Taha M. Ben Masaud; Antulio Tarazona; Xia Chen; Graham Reed; H. M. H. Chong

2013 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2013),
paper WL4_6

Low Temperature Hot-Wire Polysilicon Waveguides

Taha M. Ben Masaud, Antulio Tarazona, Xia Chen, Graham Reed, and H. M. H. Chong

Conference on Lasers and Electro-Optics/Pacific Rim 2013

Kyoto Japan
30 June–4 July 2013
ISBN: 978-1-4673-6475-1

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Passive Waveguide Devices (WL4)

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T. M. Ben Masaud, A. Tarazona, X. Chen, G. Reed, and H. M. H. Chong, "Low Temperature Hot-Wire Polysilicon Waveguides," in 2013 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2013), paper WL4_6.

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Abstract

We fabricated and measured low loss polysilicon waveguides deposited using Hot-Wire Chemical Vapor Deposition (HWCVD) at 240 °C. The optical propagation loss was measured to be 11.9 dB/cm at λ = 1550 nm.

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