Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEOPR > 2013 > WF4 > WF4_6
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WF4_6

Scattering Light From Several-ten Nanometer Defects of an Optical Diffractive Element

Manabu Hakko, Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, and Yoshio Hayasaki

Not Accessible

Your library or personal account may give you access

Abstract

Scattering light from several-ten nanometer defects of an optical diffractive element was investigated with a scatterometer. We firstly demonstrated an agreement between the measurements and computer simulations over 107 dynamic range.

© 2013 IEICE

PDF Article
More Like This
Light Collection from Fluorescence-Based Biochips by Holographic Diffractive Optical Elements

Peter Macko and Maurice P. Whelan
7371_1E European Conference on Biomedical Optics (ECBO) 2009

Optical performance evaluation from microrelief profile scans of diffractive optical elements

Michael A. Golub
DTuC4 Diffractive Optics and Micro-Optics (DOMO) 2000

Compact Light Scatter Techniques for Optical Coatings

Alexander von Finck, Tobias Herffurth, Sven Schröder, and Angela Duparré
ThD.9 Optical Interference Coatings (OIC) 2013

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use