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Optica Publishing Group
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuF4_5

Long Range, High accuracy Absolute Distance Measurement by Improved Three-Wavelength Heterodyne Interferometry

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Abstract

The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm.

© 2013 IEICE

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