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  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper J524

Low Voltage sub-30nm Dielectric and Metal Nanopatterning for Plasmonic and Metamaterial Applications

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Abstract

We present a simple approach for sub-30nm dielectric and metal patterning based on low voltage electron beam lithography and standard lift-off process by using 42nm hydrogen silsesquioxane and 200nm ZEP resist.

© 2011 AOS

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