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Conferences > CLEOPR > 2011 > PSW > C992
  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper C992

Selective Gold Film Removal from Multilayer Substrates

Hayley Ware, Fraser MacMillan, Malkhaz Meladze, Charles A. Rohde, and M. Cather Simpson

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Abstract

Pulsed UV laser ablation is used to remove a thin (250nm) gold film from one side of a 130μm thick quartz substrate. This is done without removing the gold film deposited on the bottom of the quartz plate. An excimer laser is used to remove the gold film with single pulse ablation. We further analyze the effects of increasing pulse energies on the bottom film, and show the progression from pinhole formation to simultaneous removal of both gold films as function of pulse overlap.

© 2011 AOS

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