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  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper C736

Range Expansion of Single-Shot Surface Profilometry by Installing Optical Resonator into Interferometer

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Abstract

We have proposed to install an optical resonator into an optical interferometer for expanding measurement dynamic range of a single shot profilometry. 30 times range expansion was experimentally confirmed.

© 2011 AOS

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