Abstract

A novel, optical approach to the interrogation of MEMS cantilever sensors is discussed. We investigate the effects of placing a diffraction grating in a Si waveguide below a cantilever arm, to create a resonant cavity which will create interference on an optical signal through the waveguide. We look at FDTD simulations of the optical power transmitted through this device as the cantilever's height changes in relation to the diffraction grating. We discuss the use of this interrogation technique on micro-cantilever-based sensors operating in both the dynamic and static mode.

© 2011 AOS