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Conferences > CLEOPR > 2009 > WG4 > WG4_5
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper WG4_5

Fabrication of photonic crystal cavity laser using a combined lithography of laser holography and focused ion beam

Sungmo Ahn, Sihan Kim, Heonsu Jeon, and Hyo Jin Kim

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Abstract

To enable a large scale and high throughput fabrication of photonic crystal (PC) cavity lasers, we combined laser holography (for the background P C generation) and focused ion beam (for cavity formation). The resultant lasers exhibited threshold and output powers comparable to those of electron-beam generated ones.

© 2009 IEEE

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