The recent progress on high power Deep-Ultraviolet (DUV) solid state lasers in our lab is reviewed. DUV laser generations at 177.3nm of the ns-radiation with an output of 34.7 mW and the ps-radiation with an output of 41mW by harmonic generation in KBe2BO3F2 (KBBF) crystals are given. A widely tunable DUV solid state laser with an output power of exceeding 2 mW from 170 to 232.5 nm has been obtained. Moreover, the output power from 193 to 200 nm is above 100 mW and the highest power is 119.8 mW at 202.5 nm.

© 2009 IEEE

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