Fabrication of deep microtrenches with inclined parts by laser-induced backside wet etching

Tadatake Sato; Ryozo Kurosaki; Yoshizo Kawaguchi; Aiko Narazaki; Hiroyuki Niino

Conference on Lasers and Electro-Optics/Pacific Rim 2009
(Optica Publishing Group, 2009),
paper TuJ3_3

Fabrication of deep microtrenches with inclined parts by laser-induced backside wet etching

Tadatake Sato, Ryozo Kurosaki, Yoshizo Kawaguchi, Aiko Narazaki, and Hiroyuki Niino

Conference on Lasers and Electro-Optics/Pacific Rim 2009

Shanghai China
30 August–3 September 2009
ISBN: 978-1-4244-3830-3

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Laser Microfabrication (TuJ3)

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T. Sato, R. Kurosaki, Y. Kawaguchi, A. Narazaki, and H. Niino, "Fabrication of deep microtrenches with inclined parts by laser-induced backside wet etching," in Conference on Lasers and Electro-Optics/Pacific Rim 2009, (Optica Publishing Group, 2009), paper TuJ3_3.

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Abstract

Deep trenches with inclined parts were fabricated with laser-induced backside wet etching by gradual shifting the irradiation area. Inclined parts with tilting angle of up to 30° could be fabricated.

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