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  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TuE1_1

Real-Time Displacement Measurement by Use of a Coaxial Type of Laser Diode Interferometer

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Abstract

A real-time displacement sensor based on a laser diode interferometer that has a coaxial structure is proposed and demonstrated. Several measurements indicate measurement accuracy of 0.1 μm.

© 2009 IEEE

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