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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper ThD2_3

Preparation of sol-gel ZrO2/SiO2 multi-layer film based on UV-irradiation treatment

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Abstract

The transmittances of ZrO2/SiO2 25-layer film with and without UV-irradiation was compared with theoretical model. With UV-irradiation, infiltration was controlled in ZrO2/SiO2/ZrO2 three-layer film, and the refractive index had been increased by the treatment.

© 2009 IEEE

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